Deposition by Velocity Selection of Laser Ablated Particles.
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概要
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An apparatus with a rotating mechanical chopper for thin film production has been developed. It is demonstrated that the energy of ablated particles is well selected by this method. Further, this method is applicable to Au thin film deposition and, is recognized to be useful to improve thin film quality because the number of droplets in the film are drastically decreased.
- 社団法人 レーザー学会の論文
社団法人 レーザー学会 | 論文
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