Preparations of superconducting oxide films by CO2 laser physical vapor deposition.
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Superconducting films of Y-Ba-Cu-O were produced by a CO<SUB>2</SUB> laser evaporation technique based on a multi-layer deposition process using a multi-target (Y<SUB>2</SUB>O<SUB>3</SUB> and Ba-Cu-O). The average deposition rate reached typically 10 nm/s. The film exhibited the superconductive transition at 85K after annealing in oxygen at 1200K. The presence of a small-particle deposition was found to influence the character of the multi-layered films. The influences of process parameters on morphology and superconductivity of the films were discussed.
- 社団法人 レーザー学会の論文
社団法人 レーザー学会 | 論文
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