Damage mechanisms and characteristics of the cavity reflectors for vacuum ultraviolet argon excimer lasers.
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概要
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For high-power outputs from rare-gas excimer lasers, cavity reflectors having high reflectivity and free from radiation damage areprimarily required. We measure reflectivities and surface topographic features for some reflectors made of Alfilms deposited on SiO<SUB>2</SUB> substrates, SiC films deposited on graphite substrates, SiO<SUB>2</SUB> glasses, and single crystals of W, Mo, Si and Cr. The results of surface damageobserved on Al and Si mirrors as well as a thermodynamical calculation show that the surface damage is caused mainly by surfacemelting due to strong absorption of laser energy.
- 社団法人 レーザー学会の論文
社団法人 レーザー学会 | 論文
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