High brightness excimer laser oscillator-amplifier.
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概要
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In order to increase the brightness and coherence of a tunable UV excimer laser, we studied an oscillator-amplifier configuration by using one laser discharge tube. Line-narrowing to 0.12 pm is achieved by using a grating and two etalons in the oscillator. The output energy and the brightness can be enhanced greatly by injecting an oscillation beam into the unused volume of the discharge tube.
- 社団法人 レーザー学会の論文
社団法人 レーザー学会 | 論文
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