Effect of Bombarding Ion-Species on Surface Electric Properties of TiO2.
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Surface electric resistance and chemical state have been investigated for TiO<SUB>2</SUB> bombarded with 8keV ions (B<SUP>+</SUP>, C<SUP>+</SUP>, N<SUP>+</SUP>, O<SUP>+</SUP>, F<SUP>+</SUP> and Ne<SUP>+</SUP> ions). The tendencies of the resistivity change by the ion irradiation are divided into three groups; 1) no chemical change but significant decrease of electric resistance is observed (B<SUP>+</SUP> and C<SUP>+</SUP> ions), 2) neither chemical change nor decrease of electric resistance is observed (N<SUP>+</SUP>, O<SUP>+</SUP> and F<SUP>+</SUP> ions), and 3) both chemical change and decrease of electric resistance are observed (Ne<SUP>+</SUP> ions). For the Ne<SUP>+</SUP> ion irradiation, a Ti3d-derived new band appears near the Fermi level. It suggests that a part of electrons in its level becomes carrier of the conductivity. On the other hand, the Fermi edge in the UPS spectra remains unchanged for the B<SUP>+</SUP> and C<SUP>+</SUP> ion irradiations, which implies that carrier of the conductivity is positive holes created by the implanted ions.
- 公益社団法人 日本表面科学会の論文
公益社団法人 日本表面科学会 | 論文
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