A New Crystal Mounting Method for Thin-Film Thickness Monitor
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概要
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Conventional crystal mounting with a water-cooled shield is unsatisfactory for use in monitoring the film thickness during vacuum evaporation, because temperature changes under usual working conditions are too large. A new type of monitor head is described, in which the peripheral zone of the rear surface of the crystal is pasted with silver paste on a thin Beryllia spacer, which is pressed against a heat sink, a water-cooled copper block. The front surface of the crystal sees the evaporation source through a diaphragm, and an opening in a shield cap. The new monitor head has proved to be capable of determining the film thickness to ±10 Å for dielectric films such as MgF<SUB>2</SUB> and ZnS and to ±3 Å for gold films under typical working conditions. The success is ascribed to the improved heat transfer between the crystal and the heat sink.
- 公益社団法人 応用物理学会の論文
公益社団法人 応用物理学会 | 論文
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