Morphological change of PTFE by ion micro beam irradiation

概要

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Polytetrafluoroethylene (PTFE) is used in various industrial applications because of its desirable physical and chemical properties. PTFE is chemically inert under most conditions, which means that there are few suitable microfabrication techniques available, and these are top-down processes. We report the fabrication of microstructures at desired spots on the PTFE surface using a 3 MeV focused proton microbeam with no patterning masks. The beam size on the surface was about 1 μm, and the surfaces were observed by scanning electron microscopy. When the 100-μm-thick PTFE sample was circularly scanned, the irradiated areas expanded and were raised above the original surface level. When the thickness of the PTFE was increased, the edge of the structure became rough. Spiral scanning from the center of the circle in the 500-μm-thick sample formed a 250-μm-tall cone. These microstructures were created by the volume expansion along the ion trajectories in the PTFE. The structures were formed through a bottom-up process and were dependent on the proton beam and the sample thickness.
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