Structural and Optical Properties of SrTi1-xScxO3 Thin Film Prepared by RF Magnetron Sputtering
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Sc-doped SrTiO3 (SrTi0.99Sc0.01O3) thin film have prepared on MgO (001) substrate by RF magnetron sputtering using ceramic target. The substitution of Sc3+ ions was confirmed by X-ray absorption spectroscopy. The thin film prepared at the substrate temperature of 700℃ was crystallized by postannealing in O2 atmosphere at 800℃. The thin film exhibited a-axis orientation. The postannealed thin film was transparent The fundamental absorption edge of SrTi0.99Sc0.01O3 thin film shifts to lower wavelength side than that of SrTiO3 thin film. The valence band and conduction band measured by soft-X-ray spectroscopy are in good agreement with the calculated band-DOS. The energy separation between the top of the valence band and the bottom of the conduction band of the thin film is estimated to be ～3.5 eV
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