Structural and Electrical Properties of BaCe0.90Y0.10O3-δ Thin Film on Al2O3 Substrate
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概要
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The Y-doped BaCeO3 (BaCe0.90Y0.10O3-δ) thin films have prepared on Al2O3(0001) substrates by RF magnetron sputtering. The thin films prepared at the substrate temperature of 300～500°C exhibits (002), (022) and (400) orientations. The thin film consists of grain with a diameter of 60～150 nm and smooth surface, although the grain size depends on substrate temperature. The prepared thin films were transparent. The electrical conductivity of the thin film exhibits thermal activation type behavior in H2O atmosphere of temperature region from 700 to 300°C. The activation energy (EA) of the thin film estimated from the Arrhenius plot is 0.30～0.42 eV. The EA values of the thin films are lower than that of the bulk ceramics.
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一般社団法人 日本MRS | 論文
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