Infrared Spectroscopic Study on a Reaction of Hydrogen Plasma with Si(110) surface
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The reaction of hydrogen plasma with Si(110) surface was investigated at the floating condition. The evolution of hydride components in Si(110) were monitored with the infrared absorption spectroscopy in multiple internal reflection geometry (MIR-IRAS). IR data indicate that the surface was terminated with hydrogen by the exposure to hydrogen plasma, and also indicate that the atomic arrangements of Si(110) surface were distorted, then abundant parts of the surface were changed in amorphous phase with forming dihydride. However, characteristic structures of -Si-Si- chains on crystalline (110) face were retained.
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