Preparation of carbon nanotube on metal nano-dots substrate for gas sensor

概要

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Carbon nanotube has been prepared on the Si substrate with metal nanodots on using chemical vapor deposition method. Carbon nanotubes and nanosize dot structural metal substrates can be prepared on the silicon by using one process in the same chamber. Size of the nanosize dot structural metal on the silicon was about 50~500 nm and dispersion of them is small. Size and density can be controlled by the substrate temperature. Carbon nano tube on the substrate was several hundreds nm in diameter, and their density can be controlled by substrate temperature and methane gas pressure
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