Wear test and Raman analysis of diamond-like carbon films prepared by bipolar-type plasma based ion implantation
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概要
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Diamond-like carbon (DLC) films are prepared on hard metal (WC-Co) substrates by a bipolar-type plasma based ion implantation. The mechanical properties and structural changes are examined by wear test and Raman spectroscopy as a function of negative pulse voltages (Vn) in the range of -5 to -15 kV. It is found that friction coefficient is around 0.2 for each sample. However, lower Vn causes better endurance (longer steady wear distance). Raman measurements reveal that the microstructure is changed to graphite-like structure after wear test. It is assumed that the degree of graphitization is larger as Vn increases.
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一般社団法人 日本MRS | 論文
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