Electrical Properties of (Bax,Sr1-x)Ta2O6 Thin Films Using Sol-Gel Method
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概要
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Electrical properties of (Bax,Sr1-x)Ta2O6 (x=0, 0.5, 1) thin films fabricated by the Sol-Gel method were investigated. SrTa2O6 and (Ba0.5,Sr0.5)Ta2O6 thin films were found to have similar crystal structures in this study. The quadratic voltage capacitance coefficients (VCC) and the temperature coefficients of capacitance (TCC) were found to be very close for these two thin films. However, a higher dielectric constant of about 130 was obtained for the (Ba0.5,Sr0.5)Ta2O6 thin film. A low VCC of about 26 ppm/V2 and TCC of about -230 ppm/℃ were obtained for the BaTa2O6 thin film. The lowest leakage current density of about 10-8 A/cm2 at 500 kV/cm was obtained in SrTa2O6 thin film among all thin films investigated. It is considered to be due to the best surface morphology.
- 一般社団法人 日本MRSの論文
一般社団法人 日本MRS | 論文
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