刃先移動加工法を用いた曲線溝と曲面の超精密マイクロ加工

概要

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Recently, in accordance with the technical development and miniaturization of information equipments, the demand of optic elements with high precision and miniaturization is increased. The mold is used in the manufacture of the optic elements. However, it is a problem of the occurrence of severe tool wear because hard materials including cemented carbide and ceramics are used as the material of molds. To solve this problem, cutting point swivel machining by using the diamond tool with special chamfer was proposed, which has the ability to suppress tool wear and to realize ultraprecision machining. The effectiveness was verified by the microgrooving experiment of SiC. The study aims at applying the cutting point swivel machining to the machining of curved microgroove and curved surface. As a result, it is confirmed that microgrooves with arbitrary curvature can be machined with high precision. Besides, it is specially found that the method enables to obtain good roughness in both feed and pick feed direction in the plane machining and to create a curved surface with good surface quality.