ガルバノミラー式位置決めサーボ機構における動作モードを重畳させる目標軌道設計手法
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概要
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This paper proposes an efficient control method for galvanometric mirrors that moves a laser beam to drill a sequence of holes that are larger than the beam size. This method is applicable to a microprocessor-based controller and reduces the drilling time. It combines point-to-point (PTP) motion between holes with continuous path (CP) motion at each hole, producing a reference trajectory in which the circular CP orbit is superimposed onto the PTP trajectory immediately after the movement between the holes starts. In the experiment, the proposed method reduces the process time by more than 10% without loss of precision. Experimental results confirm the effectiveness of the proposed method.