多層塗布による高精度厚膜スプレーコート法の開発

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概要

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• In this paper, we propose a high-accuracy spray coating method for obtaining the thick photoresist over 200μm. A multi-layered coating method with thin photoresist layers is applied in order to achieve a thick photoresist. We evaluated the waviness and the reproducibility of the thickness of the photoresist coated on a flat substrate. The multi-layered spray coating method with the edge cover achieves high accuracy thickness of the photoresist with covering wide-range of the target thickness.

著者

• 赤松 幹夫

  Faculty of Engineering, Kagawa University

• 寺尾 京平

  Faculty of Engineering, Kagawa University

• 大平 文和

  Faculty of Engineering, Kagawa University

• 下川 房男

  Faculty of Engineering, Kagawa University

• 高尾 英邦

  Faculty of Engineering, Kagawa University

• 鈴木 孝明

  Faculty of Engineering, Kagawa University

関連論文

• 多層塗布による高精度厚膜スプレーコート法の開発

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