ステンレスを基材とするZnO振動型エナジーハーベスタの開発

スポンサーリンク

概要

• 論文の詳細を見る

• We developed the energy harvester employing piezoelectric zinc oxide (ZnO) thin film for application to large vibrational amplitude. To ensure the fracture toughness, stainless steel (SUS304) was employed as a substrate. Also, to prevent the electrical breakdown due to the pinholes in the ZnO film, conformal silicon oxide (SiO2) layer was inserted between the ZnO film and top electrode. By inserting the SiO2 layer, power efficiency was much enhanced. As a result, a generated power of 150nW was obtained when acceleration and load resistance were 0.7m/s2 and 670kΩ, respectively.

著者

• 原 基揚

  Department of Nanomechanics, Graduate school of Engineering, Tohoku University

関連論文

• ステンレスを基材とするZnO振動型エナジーハーベスタの開発

スポンサーリンク