大面積デバイスのための繊維状基材への連続微細パターン高速成形

概要

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Weaving e-textile with fibrous devices is one of the methods to realize large-area devices which can detect distribution of various physical quantities. In the process, highly efficient micro fabrication method on the fiber substrate is necessary. We have developed a reel-to-reel roller imprint system. To keep up a constant press force onto the fiber substrate during roller imprint, and to preserve the stability of deformation, we adopted press force control systems. By using a press force control method based on the rotational angle of the cylindrical molds, high speed imprint at the substrate feeding of 20m/min was realized. Micro-pattern replication down to 10μm feature size is also realized at the substrate feeding of 20m/min. These results demonstrate the feasibility of the developed system.