Fabrication of a Nanofluidic Channel for SPR Sensing Application Using Glass-to-Glass Anodic Bonding

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概要

• 論文の詳細を見る

• A flow-channel with the sub-micrometer depth was fabricated aiming highly sensitive SPR sensing. The channel structure and anodic bonding conditions based on a BK7 glass substrate were optimized. The formation of the submicrometer-depth fluidic channel was confirmed by scanning electron microscopy. Water and electrolyte solutions penetrated the prepared flow-channel by capillary force. SPR curves obtained with the fabricated flow-channel to the concentration of an electrolyte solution, which indicated that the fabricated nanofluidic channel is applicable for SPR sensing.

• 公益社団法人 電気化学会の論文

著者

• IGLESIAS Claire

  National Institute of Applied Science of Rouen

• HORIUCHI Tsutomu

  NTT Microsystem Integration Laboratories

• Haga Tsuneyuki

  Ntt Microsystem Integration Laboratories

• SEYAMA Michiko

  NTT Microsystem Integration Laboratories

• MIURA Toru

  NTT Microsystem Integration Laboratories

• IWASAKI Yuzuru

  NTT Microsystem Integration Laboratories

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• Evaluation of Finished Extreme Ultraviolet Lithography (EUVL) Masks Using a EUV Microscope
• Fabrication of a Nanofluidic Channel for SPR Sensing Application Using Glass-to-Glass Anodic Bonding

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