Effect of Dimethylselenium Supply Rate on Growth of Cu(In, Ga)Se2 Films
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概要
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Polycrystalline Cu(In,Ga)Se2 (CIGS) films were prepared by heat treatment of metallic precursors using dimethylselenium (Se(CH3)2), which is a less hazardous Se source than H2Se gas. CIGS films were fabricated at various Se(CH3)2 supply rates. We investigated the effect of the Se(CH3)2 supply rate on the crystal phase and surface morphology of the films.
著者
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Tahashi Masahiro
Chubu Univ. Kasugai Jpn
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IDO Toshiyuki
Chubu University
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IINUMA Kenji
Chubu University
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GOTO Hideo
Chubu University
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YOSHINO Kenji
University of Miyazaki
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TAKAHASHI Makoto
Chubu University
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TAHASHI Masahiro
Chubu University
関連論文
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