ワイヤーブラシを使用したCVDダイヤモンド薄膜の熱化学研磨

概要

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Mechanical polishing of CVD diamond with diamond abrasives is inefficient. Meanwhile, some metals such as iron and titanium have an affinity for carbon at high temperature, and therefore wheels of such metals are able to thermo-chemically polish CVD diamond. However, stable friction between metal solid wheel and thin film is very difficult and CVD diamond thin film is damaged in the thermo-chemical polishing process. We found that a stainless steel wire brush is able to thermo-chemically polish CVD diamond thin film with no damage. This paper demonstrates fundamental characteristics such as effect of brushing speed and heating by hot air.