シャックハルトマンセンサの画像による波面収差繋ぎ測定技術

概要

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We have developed a stitching wavefront measurement system using a Shack-Hartmann sensor for a lens of a pupil larger than the CCD camera fields. This system has the following features; (a) algorithms for the stitching error compensation using the stage position data obtained with the laser interferometers, and (b) calibration for the lens array errors of the sensor. Experiments confirmed that the difference of the root-mean-square value of wavefronts measured with 1 shot and 3X3 shots is 0.0013 of a wavelength (355nm). We evaluated the stability of the wavefront measurement against the point source mis-adjustment from 0 to 1μm in the direction of the optical axis. The fluctuation of the wavefront rms is found to be 0.0086 (2σ). Finally, a Fourier transform lens of a pupil diameter of 40mm is measured using the stitching technique. It is confirmed that the stitched boundaries are smoothly connected.