加速器ビームダクト用ＴｉＮコーティングシステムの開発

概要

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A Titanium Nitride (TiN) coating system for long beam ducts of accelerators was developed to reduce the secondary electron yield (SEY) from the inner surface and to mitigate the electron cloud effect. Coating was carried out by DC magnetron sputtering of pure titanium in argon (2.0 Pa) and nitrogen (0.5 Pa) atmospheres. A copper beam duct with a maximum length of 3.6 m was set vertically, and a titanium rod as a cathode was suspended from the top along the central axis of the duct. A movable solenoid coil with a length of 0.8 m externally supplied a magnetic field of 16 mT to accommodate the long duct. By moving the solenoid coil at specified time intervals, the TiN film was uniformly coated on the inner surface. The thickness of the coating was 200 nm, and the temperature of the ducts during the coating was 130°C. Several coated ducts were installed into the KEKB positron ring during the summer shutdown in 2007. In the subsequent beam operation, the reduction of electrons in the coated duct was confirmed.