Synthesis of Phosphate Glass Coating Film by Pulsed Laser Deposition

概要

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The coating of phosphate glass on titanium (Ti) substrate was attempted by the pulsed laser deposition (PLD) method technique. In this study, for two types of phosphate glass targets, PLD was carried out in pure O<SUB>2</SUB> vapors (200mTorr) on Ti substrate. The phosphate glasses of G6P with amorphous phase and G6Pc containing with crystal phase were used for glass coatings on Ti substrate. The coatings deposited by PLD method were studied by X-ray diffraction (XRD) analysis and FT-IR evaluation. Their microstructures of coating prepared by PLD method were observed by scanning electron microscopy with energy dispersive x-ray (SEM-EDX). The characterizations with XRD and EDX showed that the coatings produced by PLD method were very similar to the phases and compositions of used targets. It was found that PLD process can lead to the successful syntheses of coating with the same composition and phase as the starting target and be useful for synthesizing high performance coatings on Ti.
日本材料学会の論文