Flash-type Getter Pump for Evacuation of the Large Volume Apparatus

概要

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Utilization of the flash-type titanium getter pump for evacation of the large volume apparatus was studied. The testing appratus consists of the getter pump chamber, an auxiliary diffusion pump and a mass-spectrometer used to analyze the residual gases. The pumping speed for air is 1000 l/sec to 1200 l/sec at 7×10-7mm Hg, the end vacuum is 8×10-7mm Hg to 2×10-8mm Hg, and these performances are maintained for about 5 hours. The peak heights of the oil fragments other than methane in the getter pump are lower than those in the oil diffusion pump and the rotary pump. The pump system of this type will be used for evacuation of the Hitachi nuclear fusion testing device.
日本質量分析学会の論文