コンデンサプロ-ブを用いた微小振動振幅測定のリフト・オフ補償
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Vibrating amplitude measurment using a condenser sensor has a weak point that measuring sensitivity varies by the distance between the probe and the vibrating body (lift-off).<BR>This paper describes an instrumental technique suitable for industrial-measurement of the vibrating amplitude in the range 1-100, μm.<BR>In order to achieve constant sensitivity against lift-off changes, the two kinds of power sources are supplied in series with the vibrating body and the probe. One is a DC source and the other is an AC (high frequency) source. The resulting composite signal are separated into two signals by a low and a high pass filter. Low frequency component (<I>e<SUB>OL</SUB></I>) is proportional to the vibrating amplitude and inversely proportional to the lift-off squared. High frecancey component (<I>e<SUB>OH</SUB></I>) is inversely proportional to the lift-off. Then lift-off compensation is achieved by performing an operation (<I>e<SUB>OL</SUB>/e<SUP>2</SUP><SUB>OH</SUB></I>) on an electronic circuit.<BR>When the efective area of the probe is 4.11mm<SUP>2</SUP>, the lift-off compensation covers from 0.2mm to 2.0mm within the error of 5 %.
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- コンデンサプロ-ブを用いた微小振動振幅測定のリフト・オフ補償