High-Q SWCPL for CMOS millimeter-wave technology
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概要
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In this paper, slow wave coplanar waveguide transmission line (SWCPL) is proposed on patterned ground shields in 0.18µm CMOS technology for low-loss passive devices, components and interconnects in millimeter wave region. Patterned grounds act to produce the slow-wave effect and they are usually kept below the metallization plane to reduce dielectric loss of the lossy silicon substrates. The measured attenuation loss and phase constant of the proposed CPW are 0.619dB/mm and 2.574rad/mm, respectively which result in the Quality factor (Q-factor) to be 18 at 54GHz.
著者
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Yoshida K.
Department of Electronics, Graduate School of Information Science and Electrical Eng., Kyushu Univer
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Kanaya H.
Department Of Electronics Graduate School Of Information Science And Electrical Eng. Kyushu Universi
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Pokharel R.
EJUST Centre, Kyushu University
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Mat D.
Department of Electronics, Graduate School of ISEE, Kyushu University
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Sapawi R.
Department of Electronics, Graduate School of ISEE, Kyushu University
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- High-Q SWCPL for CMOS millimeter-wave technology