薄膜型サーマルコンバータの安定性の改善

概要

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We have developed a high-performance thin-film multijunction thermal converter (TMJTC) with improved stability, and evaluated its frequency property, long-term stability, and environmental property using high-precision AC-DC transfer difference comparator system. We have fabricated a TMJTC with improved deposit pattern of a Bi-Sb-Cu based thin-film thermopile to avoid interface delamination between Bi and Cu layers. Our TMJTC shows good frequency property, which is less than 5μV/V in the range from 10Hz to 100kHz at the root mean squared (rms) voltage of 10V. The long-term stability has been significantly increased due to our thin-film thermopile compared with that of previously fabricated TMJTC, which is less than 2μV/V for 18 months at room temperature. We have also evaluated the temperature, relative humidity, and pressure property based on the International Electrotechnical Commission (IEC) standards for electronic devices. The measurement results have shown that the dependence of the AC-DC transfer difference on the temperature, humidity, and the pressure is less than 1μV/V, which can be comparable to those of thermal converters as the primary standard.