Safety Measures When Dealing with High Pressure Gas in the Research Laboratory.
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概要
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Safety points for the use of the semiconductor gases in research laboratory are briefly described according to the related clauses in the revised High Pressure Gas Control Law. Those, which should be applied to all of our gas experiments, tell us how the semiconductor gases are safely produced, transported, and consumed on a small-or medium-sized scales in the research laboratory.
- 日本高圧力学会の論文