低温プラズマ処理ポリ(1-トリメチルシリル-1-プロピン)膜の処理層の気体透過性と分離性

概要

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A poly (1-trimethylsilyl-1-propyne) membrane, which has extremely high gas permeability coefficients, was modified with low temperature argon-plasma treatments. Siloxane bonds, carbonyl and hydroxyl groups were produced on the treated surface, which were determined from the ESCA and ATR-FT-IR analyses. The polymer chains in the treated layer were cross-linked, and its layer's depth was estimated at about 200 Å. For permeability coefficients for various gases in the treated membranes, the series resistance model, which composed of the treated layer and the bulk, could beused because the theoretical curves fitted the experimental data of the ideal separation factors for various gas pairs. The ideal separation factors in the treated layer could be theoretically estimated, and the factors for oxygen/nitrogen, ethylene/ethane and propylene/propane were 4.2, 1.5 and 3.5, respectively. The permeability coefficients for various gases in the treated layer could be also calculated, and the values were 10-10-10-12 (cm3 (STP) cm/ (cm2. sec. cmHg)), which were 105-fold smaller than those of the non-treated PMSP membrane. With increasing penetrant diameter, a difference in the permeability coefficients berween in the treated layer and in the bulk increased.
日本膜学会の論文