超純水装置の最近の動向
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概要
- 論文の詳細を見る
Since January 1981 American Society for Testing and Materials (ASTM) has worked to set up the Semiconductor Grade Water Specifications, in which it is proposed that living micro-organisms should be less than 1 colony per 100 ml.<BR>This proposed specification is much tighter compare with current numbers in Japan, less than 50 colonies per 100 ml. It may be possible to achieve the specification from the fact that the specification has been performed in Pharmaceutical industry, however it would be very difficult to achieve the specification in Semiconductor industry due to the difference of purpose and volume to use high purity water in both industries, especially it is most difficult in the plant operated intermittently such as laboratories. <BR>Recent advanced Ultrafiltration (UF) unit could be useful to solve the difficulty. The unit is installed at the final position of total system for this concept, practically UF element must be selected from many brands in the market according to specifications required. It is also a definite opinion in Semiconductor industry that recent UF unit is better than RO unit as long as they are used in final position of the system.
- 日本膜学会の論文