オキシンを含むリン酸塩溶液中でのアノ-ド酸化によるアルミニウムの防食効果
スポンサーリンク
概要
- 論文の詳細を見る
Aluminum thin films are widely used as conductors for integrated circuits, and with the need for finer paterning, it has become necessary to improve the reliability of aluminum thin films in the face of atmospheric humidity.This paper reports the properties of aluminum anodized in phosphate solutions with oxine Anodized films formed on aluminum were investigated by means of polarization behavior, impedance, electron microscopy, and infared and ICP plasma emission spectroscpoy Those films that were anodized in a solution of 0.1mol/L phosphate with 0.01mol/L oxine at a pH of around 3∼4 were most effective as corrosion inhibitors. These anodized films were found to consist of hydrated oxide films containing oxine