酸素イオン注入による重金属フッ化物ガラス耐水性の改善 (イオンビ-ムによる表面改質とパッシベ-ション<特集>)

概要

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A typical heavy metal fluoride glass composed of 53ZrF4-20BaF2-4LaF3-3AlF3-20NaF in molar percentage was implanted with 15keV oxygen ions to the dose of 2×1017ions/cm2. The ion implantation did not affect the transmission spectra of the glass in the infrared or visible region in any detectable extent, although it did give rise to a slight drop at the ultraviolet edge. The surface layer fabricated by ion implantation exhibited excellent chemical durability which protected the glass from being corroded by water. Surface characterizations by RBS and XPS revealed that an oxyfluoride layer was formed on the glass surface and it is concluded that this compositional modification is responsible for the improvement in the water durability of the glass.
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