マイクロ波プラズマCVD法により作製したダイヤモンド膜の光学特性

概要

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Natural II a-type diamond has a high optical transmission ratio from ultraviolet (225nm) to infrared (13μm), and a study on the optical properties of diamond films synthesized by microwave plasma CVD was accordingly carried out with a view to applying the synthesized diamond films in optical parts.Diamond films were synthesized from CH4-H2 and CO-H2 reaction gas systems on quartz substrates. Film thickness was a uniform 1μm.Raman spectroscopy showed that carbon source concentrations that did not contain non-diamond elements (amorphous carbon etc.) in the films was higher for the CO-H2 system than for the CH4-H2 system. This was because the etching rate of oxygen to carbon is higher than that of hydrogen.In terms of optical properties, the transmission ratio of diamond films containing minute amount of non-diamond elements was about 50%, and was uniform from 240nm to 2600nm. But as the amount of non-diamond elements increased, the transmission ratio at 250nm and 500nm decreased.The transmission ratio of the diamond films in the ultraviolet and visible ranges depended on the quantity of non-diamond elements in the films.
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