チャージ間のTiNおよびTiC皮膜特性評価 : X線法による残留応力測定の有効性

概要

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In a previous paper, it was reported that when the critical load (Lc) obtained by scratch testing in TiN-PVD and TiC-CVD films differed according to the charge, the surface residual stress (σr) measured by X-ray technique also differed. This implied that it might be possible to evaluate non-destructively differences in hard film characteristics between charges by measuring the surface residual stress by X-ray technique. This paper reports on the correlation between Lc and σr for two charges of TiN-PVD and TiC-PVD films in which the thickness was varied by varying the number of coatings. A linear relation between Lc and σr was observed in both films, and it was therefore concluded that the measurement of residual stress by X-ray technique is effective in evaluating nondestructively the differences in hard film characteristics between charges.
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