高効率飛行時間型電子エネルギー分析器の開発とレーザー光電子顕微鏡への応用

概要

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A high efficiency time-of-flight (TOF) electron spectrometer was developed for an application to photoelectron spectromicroscopy. The TOF spectrometer was designed to be used in combination with pulsed laser radiation, and was equipped with a set of einzel lenses to efficiently condense the electron trajectory. The electron trajectory was numerically calculated to elucidate the focusing character of the electron lens. The calculated TOF to energy conversion function was compared with the photoelectron spectrum for Ag (111) surface and was found to be accurate within ±0.1 eV. The TOF energy analyzer was successful in recording a photoelectron spectrum for each laser shot. The energy resolution was 200 meV at 6 eV energy. The performance of the photoelectron spectrometer was demonstrated by the observation of microscopic image of crystalline facets formed on a polished copper disk. The spatial resolution was found to be close to the diffraction limited beam diameter of 3.5 μm.