蒸発源にTiCを用いたゲッタポンプ
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概要
- 論文の詳細を見る
A TiC getter pump with evaporation source of TiC heater was made in order to evacuate a coating apparatus of mirror of 2.0m diameter.<BR>According to previous report the TiC bars were inserted into the ordinary alumina crucible which was a reservoir of molton metal. This time Ti is used in a wire form and is fed constantly onto a TiC heater. The conclusions are as follows.<BR>1) TiC is useful as Ti evaporating heater.<BR>2) When an oil diffusion pump was operated as a fore pump, the compound rate of exhaustion was, greatly affected by back diffusion of oil vapour. When the valve between the oil diffusion pump and the getter pump was appropriately opened, the rate of exhaustion was increased to a value 25 times as great as the rate when the valve was fully opened.<BR>3) A getter pump is not only useful for very high vacuum apparatuses with metal seals, but also, the conventional vacuum apparatus with synthetic rubber seals.
- 日本真空協会の論文