残留ガス分析におよぼす高温金属表面の影響 (I) : 諸種の金属による組或変化の概況

概要

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Residual gas analysis with a quadrupole gas analyser were carried out in order to know the variation of residual gas composition that occurred when a hot metal surface was placed in vacua of 10-6-10-7Torr. The measurements were performed with a glass bulb containing a filament (W, Re, Ta, Nb or Pt) of hair pin type or with a carbon-filament electric-bulb. The results are obtained as follows : (1) When the filament is heated at 1000-2000°C, H2, CO and CO2 increase, and H, H2O (except carbon filaments) and O2 decrease. These changes are due to reactions of residual gases with the heated metal surfaces. Decrease of H2O has a close relation with an increase of H2 and a decrease of H. Increases of CO and CO2 (on W and C) relate to decrease of 02. (2) Changes of residual gas composition depend on filament materials. Especially, the carbon filament shows quite different behaviors from those of other filaments. (3) Behaviors of m/e 41 ions with the change of filament temperature (on Re, W and C) are much different from those of molecules (or ions) with other masses. (4) While the variation of residual gas composition with W or Nb becomes drastic with filament temperature, the variation with Re shows saturation. The change with a heated W surface is more moderate than that with Re in the temperature range lower than 1600°C, and larger in the range higher than 1600°C.
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