Heリークデテクターを用いた自動リークテスト・システム
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概要
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To improve production leak testing of components of air conditioner, automobile, etc., new automatic systems with helium mass spectrometer leak detector were developed. Design basis and performances of typical two systems for automatic leak testing based on hood method and reverse hood method are described. In addition, reliability and durability of vacuum components for high speed operation of the system and the clean-up time of helium leak detector are discussed. A full automated leak testing system makes possible by adding sub-systems such as devices of loading, unloading, selecting good or leaky components, to the automated reverse hood methods system. Summarized performances of two systems are as follows : <BR>A) Automatic hood methods leak testing system.<BR>1. Detectable leak rate in working condition : <BR>About 1×10<SUP>-6</SUP> Torr <I>l</I>/sec if the work volume is about 1 liter.<BR>About 2×10<SUP>-6</SUP> Torr <I>l</I>/sec if the work volume is about 2 liter.<BR>2. Detectable sensitivity including all system : <BR>About 6×10<SUP>-9</SUP> Torr <I>l</I>/sec/div. if the work volume is about 1 liter.<BR>About 1.3×10<SUP>-8</SUP> Torr <I>l</I>/sec/div. if the work volume is about 2 liter.<BR>3. Operation speed : 2530 seconds per each one.<BR>4. Helium comsumption : 7m<SUP>3</SUP> monthly, 7hr operation/day, 22 working days/month.<BR>B) Automatic reverse hood methods leak testing system.<BR>1. Detectable leak rate in working condition : <BR>About 1×10<SUP>-6</SUP> Torr <I>l</I>/sec if the chamber volume is about 100 liter and the operating speed is 20 seconds per each one.<BR>2. Detectable sensitivity including all system : <BR>About 8.5×10<SUP>-9</SUP> Torr <I>l</I>/sec/div. if the chamber volume is about 100 liter and the operating speed is 20 seconds per each one.
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