Rotary Type Flash MethodによるInSb薄膜の作成

概要

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Recently much attention is paid on InSb thin film due to its useful properties to galvanomagnetic devices. New apparatus for vacuum evaporation are proposed. InSb films are deposited and immediately annealed in a vacuum chamber.<BR>Features of this apparatus are as follows : source material is continiously dropped to only one evaporator little by little as the hopper rotates around it. The author named this method “Rotary Type Flash Method” (R.T.F.M.).<BR>It has been found that the composition of the films was in close connection with electrical properties and the best electrical properties were acquired in films having stoichometric proportions of In and Sb. Annealing effect has an important influence upon electrical and crystalline properties of the films.
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