エキシマ-・レ-ザ-用反射鏡
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概要
- 論文の詳細を見る
The successful development of dielectric mirrors has been made in the wavelength region below 250nm for a KrF laser. Pairs of HfO<SUB>2</SUB>-SiO<SUB>2</SUB> and ZrO<SUB>2</SUB>-SiO<SUB>2</SUB> were selected for alternate layers of dielectric mirrors. A simple method with use of a transmittance curve was derived to determine the refractive index of the layer for the design of mirror.<BR>The terminal reflectors with 0% transmittance and output couplers with 70-30% transmittance were made of 2324 and 16 layers respectively. The output energy of a KrF laser was measured with these various reflectors installed as a resonator, and it was resulted in the maxmum output energy of 270 mJ. The damage threshold was also measured to be 2-3 J/cm<SUP>2</SUP>.
- 日本真空協会の論文