イオン散乱法によるAu (800Å) /Cu (300Å) 積層薄膜酸化の研究

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概要

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• By means of ISS technique, in-depth profiles were made of the Au (800 Å) / Cu (300 Å) double layer films before and after heating in vacuum or 10.6 kPa of oxygen at 163, 202 and 250°C. Prior to heating, small amounts of copper were found on the surface but not in the bulk of gold. The films were found to be homogenious Au-Cu films after heating in vacuum at 250°C for 1000 min. On the other hand, heating the double layer films in oxygen atmosphere resulted in an inverted structure, i.e., the gold layer was found to lie beneath a copper oxide overlayer. No gold was detected in the copper oxide overlayer, but some amounts of copper oxide were found in the gold underlayer.

• 日本真空協会の論文

著者

• 長阪 道雄

  日電アネルバ

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• イオン散乱法によるAu (800Å) /Cu (300Å) 積層薄膜酸化の研究

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