連続多重蒸着装置

概要

論文の詳細を見る
In case of depositing multi-Layer thin-film circuits, it is preferable to construct the whole circuit in one evacuation cycle. For this purpose, an evaporator has been designed with many special faculties, which conventional deposition aparatus is not equipped with. This article describes the construction and the evacuation data of this trial product. Principal functions are as follows : <BR>(1) 15 deposition masks are housed in the deposition chamber, and any given mask can be placed under the substrate.<BR>(2) Mutual positions between the substrate and the deposition mask are regulated with the accuracy of 10μ.<BR>(3) Faculties are provided for selecting one evaporation source out of 6, monitoring the depcsition rate in the range of 10500Å/sec, and measuring the film thickness in the range of 0.15μ.
日本真空協会の論文