ピラニ真空計の較正について
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概要
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The calibration of a Pirani gauge has been performed for various gases of H<SUB>2</SUB>, N<SUB>2</SUB>, He, and A. The Pirani gauge usxl. for this calibration was constructed for the study of “the flow rates of various gases through narrow gaps at low pressures.” The gauge can be operated by a simple constant D. C. power supply. The calibration system consists of a large volume tank, a variable leak and a burette for measuring small flow rates of various gases at low pressure. The calibration curves obtained with large flow rates showed deviations from a straight line by 14% near the lowest pressure ; the deviation was found to be largest for N<SUB>2</SUB> and smallest for H<SUB>2</SUB>. The cause for the deviation was investigated and concluded to be slow gauge responses for press re changes. The calibration curves with acaracys of 2% were obtained with the gas flow rates between 1. 5 and 2μHg /<I>l</I>sec. The pressure sensitivities of the gauge for the various gases were investigated by measuring the amounts of the heat cons 1mption. The results show in general agreement with the theory.
- 日本真空協会の論文
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- ピラニ真空計の較正について