銀蒸着膜における内部応力の焼鈍効果

概要

論文の詳細を見る
Evaporated silver films thicker than 2000 Å have been heat-treated for the two cases (1) as deposited and (2) after removal from the substrate, and the structure and internal stress have been observed by means of X-ray diffraction. Whether the substrate exists or not, the (111) orientation is enhanced at the early stage of annealing, and subsequently the grain coalescence takes place. Tensile stresses in the films, except specimens annealed at high temperature with substrates, are relieved through these processes. The stress generated by annealing is esti-mated to be thermal stress by the difference of the coefficient of expansion between the film and substrate.
日本真空協会の論文