レーザ蒸着による炭素膜の形成
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概要
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Carbon thin films were produced by means of evaporation with cwCO<SUB>2</SUB> laser as a heating agent. Electrical resistivity and light transmittance of deposited carbon films were measured and it was found that the properties of the deposited films were strongly dependent on the parent materials, i.e. a graphite-like film was obtained from powdered graphite and a diamond-like films from powdered diamond. The evaporation modes were also investigated with a quadrapole mass spectrometer.
- 日本真空協会の論文