高周波スパッタ法によるZnS : Mn薄膜EL素子の発光特性
スポンサーリンク
概要
- 論文の詳細を見る
Electroluminescent characteristics have been investigated in the systems of Ta-Ta<SUB>2</SUB>O<SUB>5</SUB>-ZnS : Mn-Au thin films (M-I-S structure) whose optically active layers (ZnS : Mn) were formed by r.f. sputtering from several kinds of targets consisting of mixture of ZnS and Mn or MnS in powder. Dependence of electroluminescence spectra on Mn concentration and the decay characteristics of light emission were investigated in detail for the thin film EL devices and it was shown that electroluminescence is based on two kinds of emission centers; one is single Mn<SUP>2+</SUP> ion with emission band centered at about 580 nm, and the other is pair of Mn<SUP>2+</SUP> ions with emission band centered at about 620 nm. It has been shown that a considerably high brightness and high efficiency are obtained in the devices whose active layers are sputtered from the target containing MnS rather than Mn metal as luminescence center. In the paper, a series of technical data on this device are presented and discussed.
- 日本真空協会の論文