液体窒素槽内での超伝導薄膜の製作
スポンサーリンク
概要
- 論文の詳細を見る
Superconducting thin films (Nb<SUB>3</SUB>Ge, Nb<SUB>3</SUB>Si and Nb) have been prepared in a chamber cooled with liquid N<SUB>2</SUB> at high rate by a magnetron sputtering method.<BR>Following results were obtained.<BR>(a) The chamber wall acts as a cryo-pump, trapping impurity gas during sputtering so that bell jar was completely separated from a pumping system to obtain environment free from oil. Nb films of three nine were obtained.<BR>(b) Just after a deposition, thermal quenching down to 80 K was performed by a thermal conduction of sample holder which contact with liquid N<SUB>2</SUB> container. This method was tried for the first time. It was effective to depress an undersirous stable phase for preparing metastable Nb<SUB>3</SUB>Ge and Nb<SUB>3</SUB>Si. As a result, production of Nb<SUB>3</SUB>Ge become easy and Nb<SUB>3</SUB>Si was obtained with high TC nearly as high as by the explosion method.
- 日本真空協会の論文