サーミスタを用いた微少気体流量計
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概要
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A new type of micro gas flow meter is described. A thermistor is the resistor with resistance of large 'negative temperature coefficient so that it can be used as a flow meter of moving fluid by utilising the variation of thermal conductivity. The modified boundary layer flow meter uses sensing elements outside of the fluid pipe and exerts no obstruction to the stream.<BR>It can be mesured very small flow rate of air at 40mmHg 1 to 10 litter per minuits by using self heated thermistors. Some of their characteristics are examined with the following results.<BR>1. The detector shows no zero-shift caused by changes of pressure and kinds of moving fluid.<BR>2. The indicative value of instrument is given by mass flow and not influenced by pressure of gasea.
- 日本真空協会の論文