走査型エキソ電子放射顕微鏡の試作

概要

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A scanning-type exoelectron microscope (EE microscope) has been designed and constructed for the examination of a damaged metal surface. The specimen surface is scanned line by line along the X- and Y-directions with a spot of ultraviolet beam in a vacuum chamber. Photostimulated exoelectron emission (PSEE) from the specimen is detected by an electron multiplier, producing an image of PSEE on the screen of an oscilloscope. The EE microscope is basically applied in the following ways.<BR>(1) The PSEE signal is fed to the Z-input of the oscilloscope after theD-A conversion by a ratemeter, giving a picture of brightness modulation, i.e., an exoelectron microphotograph (EEM-I).<BR>(2) The output pulse is directly fed to the Z-input, displaying the distribution of the PSEE intensity (EEM-II).<BR>(3) The PSEE intensity is recorded as a function of the position along a scanned path (line profile).<BR>The EE microscope has proved to be a useful tool for the study of tensile- and fatigue-deformed metal surfaces.
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